The quality of X-ray microanalysis in the ultra-soft X-ray region
- 1 August 1967
- journal article
- research article
- Published by IOP Publishing in British Journal of Applied Physics
- Vol. 18 (8) , 1033-1043
- https://doi.org/10.1088/0508-3443/18/8/301
Abstract
The quality of a microanalysis by means of X-rays may be defined in terms of the degree of spatial resolution attained, the sensitivity of detection, the precision of the measurement and the accuracy of the measurement. These parameters are discussed in relation to the ultra-soft X-ray region. The ability to perform a quantitative analysis receives special attention, and is found to be greatly affected by the nature of the chemical bonding of the specimen, the correction theory used, and the availability of accurate mass-absorption coefficient data.This publication has 5 references indexed in Scilit:
- The absorption of X rays in the range 7-17 by Be, Mg, Al, Cu and AgBritish Journal of Applied Physics, 1964
- Silicon Oxynitride: A Meteoritic MineralScience, 1964
- ULTRASOFT X-RAY ABSORPTION COEFFICIENTS OF Al, Be, C, O, and FApplied Physics Letters, 1964
- Electron Probe MicroanalysisPublished by Elsevier ,1960
- Semiempirical Determination of Mass Absorption Coefficients for the 5 to 50 Angstrom X-Ray RegionJournal of Applied Physics, 1957