Mechanisms and kinetics of Si atomic-layer epitaxy on Si(001)2×1 from Si2H6

• 1 November 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 9  (6) , 3003-3011
• https://doi.org/10.1116/1.577164

Abstract

Keywords

• ATOMIC LAYER EPITAXY
• KINETICS