Impurity Redistribution in a Semiconductor during Thermal Oxidation

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (12) , 1297
• https://doi.org/10.1149/1.2426482

Abstract

Keywords

• IMPURITY REDISTRIBUTION
• SEMICONDUCTOR DURING THERMAL OXIDATION
• REDISTRIBUTION IN A SEMICONDUCTOR