Cylindrical concave diffraction grating utilising thin silicon chip
- 26 November 1981
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 17 (24) , 934-936
- https://doi.org/10.1049/el:19810651
Abstract
A unique manufacturing method for concave diffraction gratings is proposed. Also, a cylindrical concave diffraction grating was manufactured with a multimode slab waveguide. A silicon plane diffraction grating was bent cylindrically in this method. The efficiency of the concave diffraction grating was 82% at a 1.3 μm wavelength. The efficiency was about the same as that of the plane diffraction grating.Keywords
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