The properties of Cr–Si–O thin film resistors by dc conventional sputtering

• 1 July 1983
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 1  (3) , 1565-1566
• https://doi.org/10.1116/1.572264

Abstract

Keywords

• FILM RESISTORS
• CONVENTIONAL SPUTTERING
• DC CONVENTIONAL
• PROPERTIES OF CR
• RESISTORS BY DC