Semiconductor assessment using photothermal radiometry
- 30 September 1988
- journal article
- Published by Elsevier in Infrared Physics
- Vol. 28 (5) , 287-292
- https://doi.org/10.1016/0020-0891(88)90047-4
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- Ion implant monitoring with thermal wave technologyApplied Physics Letters, 1985
- Thermal and plasma wave depth profiling in siliconApplied Physics Letters, 1985
- Detection of thermal waves through optical reflectanceApplied Physics Letters, 1985
- Imaging with Optically Generated Thermal WavesIEEE Transactions on Sonics and Ultrasonics, 1985
- New developments in photothermal radiometryInfrared Physics, 1985
- Theory of the photoacoustic effect in semiconductors influence of carrier diffusion and recombinationApplied Optics, 1982
- Optoacoustic and photothermal material inspection techniquesApplied Optics, 1982
- Photoacoustic measurements of ion-implanted and laser-annealed GaAsApplied Physics Letters, 1980
- The electrical characterisation of semiconductorsReports on Progress in Physics, 1978
- Theory of the photoacoustic effect with solidsJournal of Applied Physics, 1976