Tailoring growth and local composition by oblique-incidence deposition: a review and new experimental data
- 15 January 1994
- journal article
- review article
- Published by Elsevier in Materials Science and Engineering: R: Reports
- Vol. 11 (7) , 295-354
- https://doi.org/10.1016/0927-796x(94)90021-3
Abstract
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