Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures
- 1 March 2002
- journal article
- Published by Springer Nature in Metallurgical and Materials Transactions A
- Vol. 33 (3) , 539-554
- https://doi.org/10.1007/s11661-002-0116-3
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- High-rate through-mold electrodeposition of thick (<200 μm) NiFe MEMS components with uniform compositionJournal of Microelectromechanical Systems, 1999
- Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined by Tensile TestingMRS Proceedings, 1998
- Research, development and manufacturing plans at CAMDMicrosystem Technologies, 1997
- The LIGA technique and its potential for microsystems-a surveyIEEE Transactions on Industrial Electronics, 1995
- On the grain boundary statistics in metals and alloys susceptible to annealing twinningActa Metallurgica et Materialia, 1994
- Modelling of grain boundary misorientation spectrum in polycrystals with crystallographic textureActa Metallurgica et Materialia, 1992
- On annealing twins and CSL distributions in F.C.C. polycrystalsPhysica Status Solidi (a), 1992
- Nickel plating by pulse electrolysis: textural and microstructural modifications due to adsorption/desorption phenomenaJournal of Applied Electrochemistry, 1990
- The Structures of Electrodeposits and the Properties that Depend on ThemAnnual Review of Materials Science, 1989
- Creep cavitation and grain boundary structure in type 304 stainless steelActa Metallurgica, 1986