Deposition of Doped and Undoped ZnO Thin Films fo Gas Sensors

• 1 February 1996
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 203, 137-142
• https://doi.org/10.4028/www.scientific.net/msf.203.137

Abstract

Keywords

• SAW GAS SENSORS
• SPUTTERING
• X-RAY DIFFRACTION (XRD)
• ZINC OXIDE THIN FILM