HIGH SPATIAL RESOLUTION SIMS WITH THE UC-HRL SCANNING ION MICROPROBE

1 December 1984

journal article
Published by EDP Sciences in Le Journal de Physique Colloques

Vol. 45 (C9) , C9-197
https://doi.org/10.1051/jphyscol:1984933

Abstract

A new Ga+ scanning ion microprobe yields images at lateral resolution approaching 40 nm, making use of the secondary ions analyzed by an RF quadrupole mass filter

Keywords

SPATIAL RESOLUTION
SCANNING ION
HIGH SPATIAL
HRL SCANNING
UC HRL
ION MICROPROBE
RESOLUTION SIMS

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