A 25-nm-long Channel Metal-Gate p-Type Schottky Source/Drain Metal-Oxide-Semiconductor Field Effect Transistor on Separation-by-Implanted-Oxygen Substrate
- 1 August 2000
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 39 (8R) , 4757-4758
- https://doi.org/10.1143/jjap.39.4757
Abstract
A 25-nm-long channel metal-gate PtSi Schottky source/drain metal-oxide-semiconductor field effect transistor (MOSFET) fabricated on a separation-by-implanted-oxygen (SIMOX) substrate was demonstrated. The drain current and transconductance were 293 µA/µm and 431 mS/mm, respectively.Keywords
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