Photocrosslinking of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution: Use of Polyfunctional Benzylic Alcohols in the Design of Chemically Amplified Resist Materials with Tunable Sensitivities
- 1 August 1994
- journal article
- research article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 27 (18) , 5154-5159
- https://doi.org/10.1021/ma00096a044
Abstract
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