SiC-UV-Photodetectors

• 13 April 1988
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• Vol. 0868, 40
• https://doi.org/10.1117/12.943598

Abstract

Keywords

• BAND GAP
• PHOTODIODES
• QUANTUM EFFICIENCY
• PHOTODETECTORS
• ENERGY GAP
• ION IMPLANTATION
• ELECTRONS
• DIFFUSION