Contact spreading and the Au3In-to-Au9In4 transition in the Au-InP system

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Abstract
An investigation is made of the third stage in the series of solid‐state reactions that occur between InP and its most commonly used contact material, Au. This reaction, which results in the transformation of the contacting metallization from the pink‐colored Au3In to the silver‐colored Au9In4, is shown to be controlled by an In‐Au exchange or kickout mechanism operating at the interface between the two phases. Contact spreading, a rapid lateral expansion of the contact metallization that can consume large quantities of InP during growth, is shown to be another manifestation of this final stage in the InP‐Au reaction. A detailed description of the mechanisms, including an investigation of the kinetics of the processes involved, is presented.