Modeling of chemical-mechanical polishing with soft pads

• 1 August 1998
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 67  (2) , 249-252
• https://doi.org/10.1007/s003390050766

Abstract

Keywords

• PACS: 82.40.LS
• 82.40.YD