Aqueous KOH Etching of Silicon (110): Etch Characteristics and Compensation Methods for Convex Corners
- 1 July 1998
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 145 (7) , 2499-2508
- https://doi.org/10.1149/1.1838668
Abstract
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