Formation of CoSi2 by ion beam mixing and rapid thermal annealing
- 1 July 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 59-60, 523-527
- https://doi.org/10.1016/0168-583x(91)95271-e
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Argon ion bombardment induced mixing in CoSi: interfacial oxide effectsVacuum, 1986
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