Ultrafast Metal-Semiconductor-Metal Photoconductive Switches Fabricated Using an Atomic Force Microscope
- 1 February 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (2S) , 1387-1389
- https://doi.org/10.1143/jjap.35.1387
Abstract
The oxidation using an atomic force microscope was applied in the fabrication of ultrafast metal-semiconductor-metal photoconductive switches. The photoconductive gap was formed by the oxidation of a 4 nm-thick-titanium layer. The photoconductive gap which was 100 nm wide and covered with the oxidized titanium which is not only a good insulator but also transparent to the excitation beam. A full width at half-maximum response of 380 fs was obtained at a bias voltage of 10 V.Keywords
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