Non-linear diffusion in process modelling
- 1 June 1990
- journal article
- research article
- Published by Wiley in International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
- Vol. 3 (2) , 79-90
- https://doi.org/10.1002/jnm.1660030204
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Realistic Eigenvalue Bounds for the Galerkin Mass MatrixIMA Journal of Numerical Analysis, 1987
- Diffusion of Dopant in Crystalline Silicon: An Asymptotic AnalysisIMA Journal of Applied Mathematics, 1986
- Continuously deforming finite elementsInternational Journal for Numerical Methods in Engineering, 1985
- “Waiting-time” Solutions of a Nonlinear Diffusion EquationSIAM Journal on Applied Mathematics, 1982
- Moving Finite Elements. IISIAM Journal on Numerical Analysis, 1981
- The moving finite element method: Applications to general partial differential equations with multiple large gradientsJournal of Computational Physics, 1981
- Concentration Profiles of Diffused Dopants in SiliconPublished by Elsevier ,1981