Production of H-atom and O-atom beams by a cooled microwave discharge source
- 1 August 1977
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 48 (8) , 1002-1004
- https://doi.org/10.1063/1.1135198
Abstract
A beam of hydrogen and oxygen atoms in the thermal energy range was produced by microwave discharge. The microwave apparatus was used inside a vacuum chamber and therefore required a cooling system. We observed a typical dissociation efficiency of 0.63 from the hydrogen discharge and of 0.73 from a mixture of hydrogen and argon. After coating with concentrated ortho‐phosphoric acid, a hydrogen dissociation efficiency as high as 0.82 could be observed. The fraction of dissociated oxygen molecules was measured to be 0.33.Keywords
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