Manufacturing Silicon Carbide Microrotors by Reactive Hot Isostatic Pressing within Micromachined Silicon Molds
- 20 December 2004
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 85 (1) , 261-263
- https://doi.org/10.1111/j.1151-2916.2002.tb00077.x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO/sub 2/ and polysiliconJournal of Microelectromechanical Systems, 1999
- Silicon carbide MEMS for harsh environmentsProceedings of the IEEE, 1998
- Formation and Transportation of Intergranular and Nodular Fine-Grained β-SiC in Reaction-Sintered SiCAdvanced Ceramic Materials, 1988