Use of scanning tunneling microscopy and transmission electron microscopy to quantify and characterize CoSi2 roughness
- 1 July 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (4) , 1329-1334
- https://doi.org/10.1116/1.585863
Abstract
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