Secondary electron emission spectroscopy: A sensitive and novel method for the characterization of the near-surface region of diamond and diamond films

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Abstract
Secondary electron emission (SEE) spectroscopy has been employed in the characterization of different carbon allotropes and distinctive signatures were observed for diamond, graphite, and amorphous carbon. Via an examination of the SEE spectrum of Ar+ (1 keV) irradiated diamond surfaces, this spectroscopy is shown to be very sensitive to crystalline perfection. It is also shown that SEE spectroscopy can be used as a very effective and sensitive tool for the characterization of the near-surface region of diamond thin films.