Bestimmung von Ionenimplantationsprofilen aus der Messung der differentiellen Kapazität am Halbleiter—Elektrolyt-Kontakt
- 16 October 1976
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 37 (2) , 439-444
- https://doi.org/10.1002/pssa.2210370209
Abstract
No abstract availableKeywords
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