Effect of substrate on NO2-sensing properties of WO3 thin film gas sensors
- 1 October 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 375 (1-2) , 142-146
- https://doi.org/10.1016/s0040-6090(00)01261-x
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Nitrogen oxides-sensing characteristics of WO3-based nanocrystalline thick film gas sensorSensors and Actuators B: Chemical, 1999
- NOx gas sensing characteristics of WO3 thin films activated by noble metals (Pd, Pt, Au) layersSensors and Actuators B: Chemical, 1998
- NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporationSensors and Actuators B: Chemical, 1996
- WO3 sputtered thin films for NOx monitoringSensors and Actuators B: Chemical, 1995
- Grain‐Size Effects in Tungsten Oxide‐Based Sensor for Nitrogen OxidesJournal of the Electrochemical Society, 1994
- Environmental gas sensingSensors and Actuators B: Chemical, 1994
- Tungsten oxide-based semiconductor sensor for detection of nitrogen oxides in combustion exhaustSensors and Actuators B: Chemical, 1993
- Tungsten Oxide-Based Semiconductor Sensor Highly Sensitive to NO and NO2Chemistry Letters, 1991
- Device process dependence of low-frequency noise in GaAlAs/GaAs heterostructureSolid-State Electronics, 1989
- 活性化半導体素子によるガスの検出Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1972