Properties of piezoelectric thin films for micromechanical devices and systems
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Pyroelectric coefficient direct measurement technique and application to a nsec response time detectorFerroelectrics, 1972
- Measurement of Strains at Si-SiO2 InterfaceJournal of Applied Physics, 1966
- The tension of metallic films deposited by electrolysisProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1909