Periodic Loading and Selective Undercut Etching for High-Impedance Traveling-Wave Electroabsorption Modulators

1 February 2008

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 1-3
https://doi.org/10.1109/ofc.2008.4528440

Abstract

For the first time, selective undercut etching and periodically loaded electrodes are combined to improve impedance and velocity matching for traveling-wave electroabsorption modulators. These devices are fabricated in a platform compatible with widely tunable lasers.

Keywords

OPTICAL WAVEGUIDES
ELECTRODES
IMPEDANCE
OPTICAL MODULATION
OPTICAL DESIGN
SCATTERING PARAMETERS
WAVEGUIDE LASERS
OPTICAL TRANSMITTERS
WET ETCHING
LABORATORIES

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High-speed III-V semiconductor intensity modulators
IEEE Journal of Quantum Electronics, 1991