Effects of Ti thickness on epitaxial CoSi2 growth from Co/Ti bilayer

• 1 January 1997
• journal article
• Published by Springer Nature in Journal of Materials Science Letters
• Vol. 16  (6) , 473-475
• https://doi.org/10.1023/a:1018516410840

Abstract

Keywords

• JOURNAL
• PUBLISHED
• TI THICKNESS
• EPITAXIAL COSI2
• COSI2 GROWTH
• BILAYER
• CO/TI