Fabrication of Tunable InP/Air-gap Fabry-Perot Cavities by Selective Etching of InGaAs Sacrificial Layers
- 1 January 1999
- journal article
- Published by IOP Publishing in Physica Scripta
- Vol. T79 (1)
- https://doi.org/10.1238/physica.topical.079a00131
Abstract
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