High Temperature 4H-SiC FET for Gas Sensing Applications

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 1431-1434
• https://doi.org/10.4028/www.scientific.net/msf.338-342.1431

Abstract

Keywords

• DEVICE FUNCTION
• GAS SENSOR
• HIGH-TEMPERATURE
• METAL-OXIDE-SEMICONDUCTOR FIELD EFFECT TRANSISTOR (MOSFET)