Absolute Reflectivity Measurements Of Multilayer Mirrors In The Soft X-Ray Region

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Abstract
Multilayer soft X-ray mirrors were deposited by using a triode dc sputtering system, equipped with an accurate method pf film thickness monitoring which enables the thickness to be controlled with an accuracy of better than 0.1 Å. Absolute reflectivity measurements of Ni-C and W-C multilayers at λ = 44.79 Å (c lea) in the first and second order Bragg Peaks, and at λ = 67.8 Å (B Ka) only in the first order were carried out. The incident beam is previously polarized by two parallel plane multilayer mirrors fixed at an angle close to Brewster's one ( 0 = 45°). Thus the measured reflectivitie are not affected by a progressive variation of the P component. The preliminary results obtained at λ = 113 Å (BeKot) are also presented.

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