Widely changing probability of surface damage creation induced by a single ion in the MeV ion energy range
- 1 July 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (4) , 1914-1918
- https://doi.org/10.1116/1.590107
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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