Surface acoustic wave H/sub 2/ sensor on silicon substrate
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- NO2Gas-Concentration Measurement with a SAW-ChemosensorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Trace Chemical Vapor Detection Using SAW Delay Line OscillatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Magnetic Field Sensors Based on SAW Propagation in Magnetic FilmsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Hydrogen Sulfide Surface Acoustic Wave Gas DetectorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW DevicesIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- NH3Surface Acoustic Wave Gas DetectorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1987
- A SAW-Chemosensor for NO2Gas-Concentration MeasurementPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1985
- Palladium-surface acoustic wave interaction for hydrogen detectionApplied Physics Letters, 1982
- A Temperature Compensated High Voltage Probe Using Surface Acoustic WavesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1982
- A Surface Acoustic Wave Gas DetectorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981