Modification of crystalline semiconductor surfaces by low-energy Ar+ bombardment: Si(111) and Ge(100)
- 1 February 1993
- journal article
- Published by Elsevier in Surface Science
- Vol. 282 (3) , 333-341
- https://doi.org/10.1016/0039-6028(93)90938-g
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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