Improvements in Non-vacuum Deposition of Particulate Materials

• 1 January 2001
• journal article
• Published by Springer Nature in MRS Proceedings
• Vol. 668
• https://doi.org/10.1557/proc-668-h2.5

Abstract

Keywords

• VACUUM
• STRUCTURES
• PARTICULATE
• PLANAR
• PACKING
• DEPOSITED
• THIN FILM TECHNOLOGIES
• PARTICLES