Can Chip Devices Keep Shrinking?
- 13 December 1996
- journal article
- other
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 274 (5294) , 1834-1836
- https://doi.org/10.1126/science.274.5294.1834
Abstract
Investigators are working to devise silicon-patterning schemes to produce features far smaller than those etched with today's lithographic systems, as reported in this week's issue. In an upcoming issue, Science will explore the new types of devices made possible by these technologies.This publication has 0 references indexed in Scilit: