Micromolding of polymer waveguides

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Abstract
In microsystem technology the fabrication of either passive or active micro optical components made from polymers becomes more and more evident with respect to the intense expanding application possibilities e.g. in telecommunication. Actually, the LIGA process developed at the FZK, Germany allows the direct fabrication of microcomponents with lateral dimensions in the micrometer range, structural details in the submicrometer range, high aspect ratios of up to several hundreds and a final average surface roughness of less than 50 nm in small up to large scales. The molding of polymer components for microoptical applications, especially in the singlemode range, is determined by the achievable maximum accuracy of the molding technique itself and of the acceptable tolerances for low damping and coupling losses. Following the LIGA and related technique e.g. mechanical microengineering we want to present in this work the fabrication of polymer singlemode waveguides using a combination of micromolding and light- curing steps.

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