Relaxed fabrication tolerances for low-Fresnel-number lenses
- 1 July 1997
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 14 (7) , 1599-1606
- https://doi.org/10.1364/josaa.14.001599
Abstract
Numerical simulations have been performed to study the influence of resist-developing errors on continuous-relief microlenses. For very low Fresnel numbers (N2), the focal length is essentially determined by the diffraction at the lateral pattern of the segments, and deviations from the ideal blaze influence only the efficiency. A qualitative picture based on Fourier optics is given to explain these markedly relaxed tolerances with respect to depth errors for planar optical elements and even for low Fresnel numbers.Keywords
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