ELABORATION OF M-TYPE Ba-FERRITES FILMS BY R.F. SPUTTERING

1 December 1988

journal article
Published by EDP Sciences in Le Journal de Physique Colloques

Vol. 49 (C8) , C8-941
https://doi.org/10.1051/jphyscol:19888429

Abstract

Amorphous Ba-M films have been prepared in a R.F. TFTS apparatus. Their composition is always the same as the target. These films prepared at 20 °C and 400 °C were amorphous. Only those deposited at 400 °C become oriented after annealing

Keywords

TYPE BA
SPUTTERING
ELABORATION
FILMS BY R.F
BA FERRITES FILMS

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