A monolithic PDMS waveguide system fabricated using soft-lithography techniques
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- 13 June 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 23 (6) , 2088-2093
- https://doi.org/10.1109/jlt.2005.849932
Abstract
A monolithic waveguide system using poly(dimethyl siloxane) (PDMS) was designed, fabricated, and characterized. The waveguide demonstrated good confinement of light and relatively low attenuation at 0.40 dB/cm. The robustness and handling properties of the completed waveguides were excellent, and the process yield exceeded 96%. The waveguide did exhibit moderate temperature and humidity sensitivity but no temporal variation, and insertion loss remained stable over extended periods of time. Applications of this waveguide system in microscale sensing are immense, judging by the frequency of use of PDMS as the substrate for microfluidic and biomedical systems. The monolithic nature of the waveguides also reduces their cost and allows integration of optical pathways into existing PDMS-based microsystems.Keywords
This publication has 19 references indexed in Scilit:
- Micro capillary electrophoresis chips integrated with buried SU-8/SOG optical waveguides for bio-analytical applicationsSensors and Actuators A: Physical, 2003
- Microcontact Printing Using Poly(dimethylsiloxane) Stamps Hydrophilized by Poly(ethylene oxide) SilanesLangmuir, 2003
- Robust Interconnects and Packaging for Microfluidic Elastomeric ChipsAnalytical Chemistry, 2003
- An integrated optical oxygen sensor fabricated using rapid-prototyping techniquesLab on a Chip, 2003
- Preparation and characterization of some unusually transparent poly(dimethylsiloxane) nanocompositesJournal of Polymer Science Part B: Polymer Physics, 2003
- Simple and Low Cost Fabrication of Thermally Stable Polymeric Multimode Waveguides using a UV-curable EpoxyJapanese Journal of Applied Physics, 2003
- Evaluation of a Three-Dimensional Micromixer in a Surface-Based BiosensorLangmuir, 2002
- A Novel Asymmetric Clamping Cell for Measuring Streaming Potential of Flat SurfacesLangmuir, 2002
- Microfluidic Networks Made of Poly(dimethylsiloxane), Si, and Au Coated with Polyethylene Glycol for Patterning Proteins onto SurfacesLangmuir, 2001
- Optical Waveguide ModesPublished by Springer Nature ,1982