Measurement of Outgassing Rate by Conductance Modulation Method.

• 1 January 1993
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 36  (3) , 175-177
• https://doi.org/10.3131/jvsj.36.175

Abstract

Keywords

• OUTGASSING RATE
• MODULATION METHOD
• CONDUCTANCE MODULATION
• MEASUREMENT OF OUTGASSING