Auger electron spectroscopy and microscopy with probe-size limited resolution
- 29 April 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (17) , 1890-1892
- https://doi.org/10.1063/1.105064
Abstract
High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.Keywords
This publication has 1 reference indexed in Scilit:
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