Advanced ALE processes of amorphous and polycrystalline films
- 1 March 1997
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 112, 223-230
- https://doi.org/10.1016/s0169-4332(96)01004-5
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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