Simultaneous ion implantation and deposition

This publication has 6 references indexed in Scilit:

• Surface modification by ion beams
  Vacuum, 1986
• Materials modification with ion beams
  Reports on Progress in Physics, 1986
• Fundamental aspects of ion beam mixing
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
• Ion beam mixing: Basic experiments
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Fundamental aspects of ion beam surface modification: defect production and migration processes
  Materials Science and Engineering, 1985
• Ion-beam mixing of metal-semiconductor eutectic systems
  Nuclear Instruments and Methods, 1981