Roughness Measurement of X-Ray Mirror Surfaces

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Abstract
In order to fabricate an X-ray mirror telescope, we investigated the roughness of mirror surfaces using X-ray scattering. With Al-K (8.34Å) X-rays we measured the scattering profiles of plate glass. The spectral structure of surface roughness was revealed by the angular distribution of the X-ray scattering. The power spectral density functions of the surface-height distribution for these materials (except for a gold evapolated surface) were represented by the power-law spectra with power indices ranging from -1 to -2. The rms heights were derived to be 1.8-8.3Å for a wavelength range as expected from the power-law spectrum. The results obtained with this method were found to be consistent with those with an ordinary optical profilometer.