Microelectromechanical filters for signal processing
- 1 January 1992
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Microelectromechanical (MEM) filters based on coupled, lateral microresonators are demonstrated. This class of MEM systems has potential signal-processing applications for filters which require narrow bandwidth (high Q), good signal-to-noise ratio (SNR) and stable temperature and aging characteristics. Both series and parallel filters were fabricated and tested using an off-chip modulation technique. The frequency range of these filters is from approximately 5 kHz to on the order of 1 MHz, for polysilicon microstructures with suspension beams having a 2- mu m-square cross section. A series-coupled resonator pair, designed for operation at atmospheric pressure, has a measured center frequency of 18.7 kHz and a bandwidth of 1.2 kHz.Keywords
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