Local vibrational modes as a probe of activation process in p-type GaN
- 6 September 1999
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (10) , 1383-1385
- https://doi.org/10.1063/1.124701
Abstract
Raman spectra for a series of Mg-doped GaNfilmsgrown by metal organic chemical vapor deposition and annealed in N 2 ambiance at different temperatures have been investigated. Some local vibrational modes related to hydrogen were observed, showing drastic changes with the annealing temperature. The spectra show clearly that H impurities incorporated in as-grown films, which passivate Mg acceptors, are released from the Mg–N bonding at above ∼600 ° C , and diffuse in the film to form new chemical bondings. We have also observed a local mode related to activated Mg acceptors. This mode is conveniently used as a probe of the activation process of Mg acceptors.Keywords
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