Electron beam tester a tool for VLSI components analysis

• 31 December 1987
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 7  (2-4) , 327-332
• https://doi.org/10.1016/s0167-9317(87)80027-8

Abstract

Keywords

• VLSI COMPONENT
• INCREASING COMPLEXITY
• VLSI COMPONENTS ANALYSIS
• POWERFUL TOOL
• NEW POWERFUL HELP
• VARIOUS WAY
• ELECTRON BEAM TESTER
• INTEGRATED CIRCUIT
• CAMECA WORK
• ELECTRON BEAM