Megavolt arsenic implantation into silicon
- 1 September 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 95 (4) , 363-367
- https://doi.org/10.1016/0040-6090(82)90042-6
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Ion-implanted FET for power applicationsIEEE Transactions on Electron Devices, 1974
- Experimental Evaluation of High Energy Ion Implantation Gradients for Possible Fabrication of a Transistor Pedestal CollectorIBM Journal of Research and Development, 1971