A capacitive CO2 sensor with on-chip heating
- 1 April 1995
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 25 (1-3) , 412-414
- https://doi.org/10.1016/0925-4005(95)85093-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Two-dimensional and three-dimensional interdigital capacitors as basic elements for chemical sensorsSensors and Actuators B: Chemical, 1991
- Thin-film gas sensors with organically modified silicates for the measurement of SO2Sensors and Actuators B: Chemical, 1991